Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers.
نویسندگان
چکیده
We present a method to independently measure the refractive index and the thickness of materials having flat and parallel sides by using a combination of Michelson and Fabry-Perot interferometry techniques. The method has been used to determine refractive-index values in the infrared with uncertainties in the third decimal place and thicknesses accurate to within +/- 5 microm for materials at room and cryogenic temperatures.
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عنوان ژورنال:
- Applied optics
دوره 44 3 شماره
صفحات -
تاریخ انتشار 2005